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Entities25 of 207,987
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Entity
krypton sputtering
technology1 mentionslast seen Nov 13, 2026
Deposition technique using krypton gas to synthesize body-centered cubic tantalum films at lower temperatures.
Relationships 3
Relationship
krypton sputteringdepends onbody-centered cubic tantalum
93% confidence1 supporting mentions
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Sources 1