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Entities25 of 207,987
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Entity
vacuum-gap micro-Fabry-Perot cavity
technology1 mentionslast seen Oct 20, 2026
Compact cavity with Q-factor of 3.46E9 used for laser stabilization.
Relationships 1
Relationship
silicon photonic chipcomposed ofvacuum-gap micro-Fabry-Perot cavity
85% confidence1 supporting mentions
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Sources 1