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Entities25 of 207,987
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Entity
epitaxial thin film growth via single target sputtering
technology1 mentionslast seen Nov 4, 2026
Method for growing high-quality D019 Mn3Ge thin films using sputtering from a Mn5Ge target.
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Relationship
epitaxial thin film growth via single target sputteringimplementsD019 Mn3Ge
88% confidence1 supporting mentions
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Sources 1