tera.ai

Knowledge Graph

Graph explorer

Search resolved entities, walk their edges, and read the sentence behind every one.

Entities25 of 207,987

All entities

Entity

plasma-enhanced chemical vapor deposition

technology4 mentionslast seen Oct 28, 2026

Process technology used in the Flowable Carbon system.

Relationships 3

plasma-enhanced chemical vapor deposition

Relationship

ACM Researchdevelopsplasma-enhanced chemical vapor deposition

99% confidence2 supporting mentions

Either name opens that entity’s relationships.

Sources 2